Molecular Weight — 146.05
Sulfur Hexafluoride
Mol. Weight
146.05
Max Purity
99.9999%
Specific Vol.
2.50 ft³/lb
UN Number
UN1080
Shipping Information
Technical Data
About This Gas
Sulfur hexafluoride is a dense, non-toxic, non-flammable gas with one of the highest dielectric strengths of any known substance — approximately 2.5 times greater than air at equal pressure. This exceptional electrical insulating capability makes it the gas of choice for high-voltage gas-insulated switchgear (GIS), circuit breakers, and transmission substations, where it prevents arcing at voltages exceeding 1,000 kV. Utility operators and grid infrastructure developers across North America depend on high-purity SF₆ to ensure reliable, compact, and low-maintenance electrical installations.
In semiconductor fabrication, SF₆ serves as a primary plasma etchant for silicon, silicon nitride, and silicon dioxide. Its high fluorine radical yield under plasma conditions enables rapid, highly anisotropic material removal in both MEMS device patterning and advanced logic node patterning. It is also employed as a chamber-cleaning agent in CVD tools, where NF₃ is unavailable or undesirable. Electronic-grade SF₆ (99.9999% min.) meets the stringent trace-moisture and particle specifications demanded by leading-edge fab processes.
Beyond power and electronics, SF₆ is used as an echocardiographic contrast agent in diagnostic ultrasound — encapsulated in microbubbles, it dramatically improves endocardial border definition during cardiac imaging procedures. Airocean Gases supplies SF₆ across a full range of purity grades from Chemical Pure (99.9%) to Electronic Grade (99.9999%), in cylinder sizes from laboratory samples to bulk tube trailers, backed by full certificates of analysis and same-day SDS access.
Available Grades
Grade
Chemical Pure (CP)
Purity
99.9% min.
Application Type
Industrial / GIS
Product Code Prefix
SG SF6CP-
Grade
Ultra Plus (UP)
Purity
99.99% min.
Application Type
Analytical / Lab
Product Code Prefix
SG SF6UP-
Grade
Research (RES)
Purity
99.999% min.
Application Type
R&D / Plasma
Product Code Prefix
SG SF6RES-
Grade
Electronic (EL)
Purity
99.9999% min.
Application Type
Semiconductor Fab
Product Code Prefix
SG SF6EL-
Type
T High-Pressure Cylinder
Water Capacity
~49 L
Service Pressure
830 psi (57 bar)
Valve Outlet
CGA 590
Net Gas Weight
~34 kg (~75 lb)
SKU Suffix
-T
Type
K High-Pressure Cylinder
Water Capacity
~49 L
Service Pressure
830 psi (57 bar)
Valve Outlet
CGA 590
Net Gas Weight
~34 kg (~75 lb)
SKU Suffix
-K
Type
D Cylinder
Water Capacity
~25 L
Service Pressure
830 psi (57 bar)
Valve Outlet
CGA 590
Net Gas Weight
~17 kg (~37 lb)
SKU Suffix
-D
Type
Q High-Pressure Cylinder
Water Capacity
~49 L
Service Pressure
830 psi (57 bar)
Valve Outlet
CGA 590
Net Gas Weight
~34 kg (~75 lb)
SKU Suffix
-Q
Type
Size 55 Cylinder
Water Capacity
~10 L
Service Pressure
830 psi (57 bar)
Valve Outlet
CGA 590
Net Gas Weight
~7 kg (~15 lb)
SKU Suffix
-55
Type
R Cylinder
Water Capacity
~16 L
Service Pressure
830 psi (57 bar)
Valve Outlet
CGA 590
Net Gas Weight
~11 kg (~24 lb)
SKU Suffix
-R
* Specifications are nominal. SF₆ is supplied as a liquefied gas; net fill weights may vary with temperature. Contact our technical sales team for bulk supply, custom cylinder configurations, or on-site delivery programs.
Our technical sales team is ready to provide pricing, SDS documents, and supply solutions for sulfur hexafluoride.