SF₆
Specialty Gas  ·  CAS 2551-62-4  ·  Mol. Weight 146.05

Molecular Weight — 146.05

SF₆

Sulfur Hexafluoride

Mol. Weight

146.05

Max Purity

99.9999%

Specific Vol.

2.50 ft³/lb

UN Number

UN1080

UN NumberUN1080
Hazard ClassClass 2.2
Subsidiary RiskNone
Hazard LabelNon-Flammable Gas
AppearanceColorless Gas, Faint Aromatic Odor
CAS Number2551-62-4
Molecular Weight146.05 g/mol
Sublimation Pt.−63.8 °C (−82.8 °F) at 1 atm
Specific Volume2.50 ft³/lb
PhaseLiquefied Gas

Sulfur
Hexafluoride

Sulfur hexafluoride is a dense, non-toxic, non-flammable gas with one of the highest dielectric strengths of any known substance — approximately 2.5 times greater than air at equal pressure. This exceptional electrical insulating capability makes it the gas of choice for high-voltage gas-insulated switchgear (GIS), circuit breakers, and transmission substations, where it prevents arcing at voltages exceeding 1,000 kV. Utility operators and grid infrastructure developers across North America depend on high-purity SF₆ to ensure reliable, compact, and low-maintenance electrical installations.

In semiconductor fabrication, SF₆ serves as a primary plasma etchant for silicon, silicon nitride, and silicon dioxide. Its high fluorine radical yield under plasma conditions enables rapid, highly anisotropic material removal in both MEMS device patterning and advanced logic node patterning. It is also employed as a chamber-cleaning agent in CVD tools, where NF₃ is unavailable or undesirable. Electronic-grade SF₆ (99.9999% min.) meets the stringent trace-moisture and particle specifications demanded by leading-edge fab processes.

Beyond power and electronics, SF₆ is used as an echocardiographic contrast agent in diagnostic ultrasound — encapsulated in microbubbles, it dramatically improves endocardial border definition during cardiac imaging procedures. Airocean Gases supplies SF₆ across a full range of purity grades from Chemical Pure (99.9%) to Electronic Grade (99.9999%), in cylinder sizes from laboratory samples to bulk tube trailers, backed by full certificates of analysis and same-day SDS access.

Product Specifications

Grade

Chemical Pure (CP)

Purity

99.9% min.

Application Type

Industrial / GIS

Product Code Prefix

SG SF6CP-

Grade

Ultra Plus (UP)

Purity

99.99% min.

Application Type

Analytical / Lab

Product Code Prefix

SG SF6UP-

Grade

Research (RES)

Purity

99.999% min.

Application Type

R&D / Plasma

Product Code Prefix

SG SF6RES-

Grade

Electronic (EL)

Purity

99.9999% min.

Application Type

Semiconductor Fab

Product Code Prefix

SG SF6EL-

Cylinder & Packaging Options

Type

T High-Pressure Cylinder

Water Capacity

~49 L

Service Pressure

830 psi (57 bar)

Valve Outlet

CGA 590

Net Gas Weight

~34 kg (~75 lb)

SKU Suffix

-T

Type

K High-Pressure Cylinder

Water Capacity

~49 L

Service Pressure

830 psi (57 bar)

Valve Outlet

CGA 590

Net Gas Weight

~34 kg (~75 lb)

SKU Suffix

-K

Type

D Cylinder

Water Capacity

~25 L

Service Pressure

830 psi (57 bar)

Valve Outlet

CGA 590

Net Gas Weight

~17 kg (~37 lb)

SKU Suffix

-D

Type

Q High-Pressure Cylinder

Water Capacity

~49 L

Service Pressure

830 psi (57 bar)

Valve Outlet

CGA 590

Net Gas Weight

~34 kg (~75 lb)

SKU Suffix

-Q

Type

Size 55 Cylinder

Water Capacity

~10 L

Service Pressure

830 psi (57 bar)

Valve Outlet

CGA 590

Net Gas Weight

~7 kg (~15 lb)

SKU Suffix

-55

Type

R Cylinder

Water Capacity

~16 L

Service Pressure

830 psi (57 bar)

Valve Outlet

CGA 590

Net Gas Weight

~11 kg (~24 lb)

SKU Suffix

-R

* Specifications are nominal. SF₆ is supplied as a liquefied gas; net fill weights may vary with temperature. Contact our technical sales team for bulk supply, custom cylinder configurations, or on-site delivery programs.

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