Airocean Gases · Product Portfolio

Noble &
Specialty
Gases

Seven gases. Sourced at the molecular boundary of purity — enabling the processes that build microchips, insulate power grids, propel spacecraft, and image the human body.

10 Ne Neon 36 Kr Krypton 54 Xe Xenon 2 He Helium Dielectric SF₆ Sulf. Hexafluoride Medical N₂O Nitrous Oxide Etchant CF₄ Tetrafluoromethane
36
Kr
Krypton

Krypton

Noble Gas  ·  Element 36  ·  Group 18

A colorless, odorless noble gas with exceptional light-emission properties. Critical to KrF excimer laser systems operating at 248 nm — the wavelength that defines a generation of semiconductor photolithography. Also used in high-efficiency lighting and thin-film photovoltaic deposition processes.

Max Purity 99.999% (5N)
Boiling Point −153.4 °C
Atomic Weight 83.798 u
Supply Form Cylinder / Bulk
CAS No. 7439-90-9
KrF Excimer Lasers Photolithography Lighting Photovoltaics IC Packaging
Full Specifications
54
Xe
Xenon

Xenon

Noble Gas  ·  Element 54  ·  Group 18

The heaviest of the stable noble gases, xenon occupies a unique position across industries. Its brilliant white arc drives cinema projection and automotive headlamps. Its density and ionization properties make it the preferred propellant for ion thrusters in deep-space missions. In medicine, hyperpolarized Xe-129 serves as an MRI contrast agent for lung imaging; pure xenon also functions as a hemodynamically stable anesthetic.

Max Purity 99.9999% (6N)
Boiling Point −108.1 °C
Atomic Weight 131.293 u
Supply Form Cylinder / Liquid
CAS No. 7440-63-3
Ion Propulsion Medical Anesthesia MRI Contrast XeCl Lasers Arc Lighting
Full Specifications
10
Ne
Neon

Neon

Noble Gas  ·  Element 10  ·  Group 18

The rarest atmospheric noble gas by extraction volume, neon is simultaneously one of the most strategically critical materials in semiconductor manufacturing. ArF and KrF excimer lasers — the workhorses of advanced node lithography — consume neon as a primary lasing medium. Beyond the fab, neon's signature 632.8 nm red-orange discharge defined twentieth-century visual culture and remains central to scientific metrology and display technology.

Max Purity 99.999% (5N)
Boiling Point −246.1 °C
Atomic Weight 20.180 u
Supply Form Cylinder / Bulk
CAS No. 7440-01-9
ArF / KrF Lasers Photolithography Discharge Lighting Environmental Tracing Photovoltaics
Full Specifications
2
He
Helium

Helium

Noble Gas  ·  Element 2  ·  Group 18

The coldest boiling point of any element at −268.9 °C places helium in a category of its own. Liquid helium is the sole coolant capable of maintaining the superconducting state in MRI and NMR magnets. In semiconductor manufacturing, helium purges process chambers, cools wafer stages, and serves as the gold-standard carrier gas for GC and GC-MS analytical instruments. Its molecular diameter makes it the universal standard for pressurized leak detection across aerospace and industrial applications.

Max Purity 99.9999% (6N)
Boiling Point −268.9 °C
Atomic Weight 4.0026 u
Supply Form Cylinder / Dewar / Bulk
CAS No. 7440-59-7
MRI / NMR Cooling Leak Detection Gas Chromatography Fiber Optics Lifting
Full Specifications
SF₆
SF₆
Sulfur Hexafluoride

Sulfur Hexafluoride

Specialty Gas  ·  CAS 2551-62-4  ·  UN1080

One of the most powerful dielectric gases known — SF₆ is the standard insulating and arc-quenching medium in high-voltage gas-insulated switchgear (GIS), circuit breakers, and transmission substations. In semiconductor fabrication, it serves as a primary plasma etchant for silicon and silicon nitride, and as a CVD chamber-clean agent at 99.9999% electronic grade.

Max Purity 99.9999% (6N)
Sublimation Pt. −63.8 °C at 1 atm
Molecular Weight 146.05 g/mol
Supply Form Cylinder (Liquefied)
CAS No. 2551-62-4
GIS / Switchgear Plasma Etching CVD Chamber Clean Medical Ultrasound Leak Detection
Full Specifications
N₂O
N₂O
Nitrous Oxide

Nitrous Oxide

Specialty Gas  ·  CAS 10024-97-2  ·  UN1070

A colorless oxidizing gas with the broadest application range in our specialty portfolio. In healthcare, N₂O is an established analgesic and anesthetic adjunct used from dental offices to surgical suites. In semiconductor CVD, it is the primary oxidant source for silicon dioxide and silicon oxynitride gate dielectric films — available up to 99.9995% electronic grade for advanced node processes.

Max Purity 99.9995% (EL)
Boiling Point −88.5 °C
Molecular Weight 44.013 g/mol
Supply Form Cylinder (Liquefied)
CAS No. 10024-97-2
Medical Anesthesia Semiconductor CVD Gate Dielectrics Food Processing Analytical
Full Specifications
CF₄
CF₄
Tetrafluoromethane

Tetrafluoromethane

Specialty Gas  ·  CAS 75-73-0  ·  UN1982

A thermally and chemically inert perfluorocarbon gas that generates highly reactive fluorine radicals under plasma conditions. CF₄ is a mainstay etchant for silicon, polysilicon, SiO₂, and Si₃N₄ patterning across DRAM, NAND, and advanced logic nodes, and a proven PECVD chamber-clean agent. Supplied at semiconductor grade 5.0 (99.999% min.) with moisture and oxygen controlled below 1 ppmv.

Max Purity 99.999% (5N)
Boiling Point −127.8 °C
Molecular Weight 88.01 g/mol
Supply Form Cylinder / Bulk
CAS No. 75-73-0
Plasma Etching Chamber Cleaning DRAM / NAND Excimer Lasers Cryogenic Research
Full Specifications
6N
Maximum purity grade
available (99.9999%)
7
High-purity gases
in portfolio
99%
Supply chain
on-time reliability
500+
Satisfied clients
worldwide

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